Global Slurry Recycling System Market Strategic Research Report

Scope of the Report

The global Slurry Recycling System market size is predicted to grow from US$ 181 million in 2025 to US$ 342 million in 2032; it is expected to grow at a CAGR of 9.2% from 2026 to 2032.

Slurry Recycling System refers to a process-integrated recycling system used in semiconductor wafer slicing, grinding, polishing and CMP processes to recover and reuse valuable components from spent slurry, including silicon particles, abrasive grains, coolants, ultrapure water and chemical ingredients. Depending on the process, the system may use centrifugation, filtration, ultrafiltration, chemical spiking and automated re-supply to convert waste slurry or silicon-containing wastewater into reusable process media, thereby reducing slurry consumption, water consumption, waste treatment cost and environmental load.

Slurry Recycling System is a process-integrated recycling system embedded in wafer processing, CMP, polishing, grinding, lapping, back grinding, dicing and other manufacturing steps. Systems represented by IHI are more focused on the recovery of silicon particles, abrasive grains, coolants and water generated during wafer slicing, grinding and hard-and-brittle material processing. Systems represented by PUE, Fäth/HighQ and MFC Technology are more oriented toward CMP or polishing slurry reclamation, including filtration, composition monitoring, chemical make-up/spiking and re-supply. Nomura Micro Science and Kanadevia, meanwhile, are more focused on silicon-containing wastewater, post-lapping slurry and the recovery of reusable abrasive grains.

From the perspective of market applications, Slurry Recycling Systems currently serve three main customer scenarios. The first is semiconductor wafer and hard-and-brittle material processing plants, covering wafer slicing, edge grinding, grinding, polishing, thinning, lapping and other processes. In these applications, customers are mainly concerned with reducing the loss of silicon kerf, abrasive grains, coolants and water, while also reducing the treatment burden of silicon-containing wastewater and abrasive-containing waste liquids. The second is CMP processes in wafer fabs, including logic, memory, power devices, CIS, MEMS, analog ICs and advanced packaging-related wafer manufacturing. CMP slurry is a high-consumption and high-cost process material, and the spent slurry also contains abrasive particles, oxidizers, complexing agents, stabilizers and residues from metal or dielectric materials. Therefore, the core motivation for fabs to adopt slurry recycling systems is to reduce fresh slurry procurement costs, lower waste liquid treatment costs, and reduce the load on ultrapure water and wastewater treatment systems in regions with water-resource constraints. The third application area includes solar wafers, sapphire, quartz, glass substrates, GaAs/compound semiconductors, FPDs and other hard-and-brittle material processing scenarios. These processes also generate large volumes of particle-containing waste liquids, and the economic value of recycling systems is mainly reflected in water reuse, abrasive reuse, solid-particle resource recovery and environmental compliance. Overall, this product is not a standardized tool required for every wafer fab production line. Instead, it is a customized, project-based system closely linked to the customer’s process flow, waste liquid composition, environmental treatment cost, slurry price, water-use constraints and facility system design.

Looking ahead, the growth drivers for Slurry Recycling Systems mainly come from the combined requirements of semiconductor manufacturing cost reduction, green manufacturing and resource circularity. As advanced nodes, mature specialty processes, power semiconductors, CIS, MEMS, advanced packaging and high-end wafer manufacturing continue to expand, the number of CMP, polishing and grinding steps will increase, driving slurry consumption and waste liquid loads upward. As a result, slurry recycling systems are expected to move beyond their previous role as an end-of-pipe environmental treatment solution and gradually become a production-side COO optimization tool.

This report presents a comprehensive overview of the global Slurry Recycling System market, covering market size and forecast, segmentation by product type and application, competitive landscape, leading players and regional and country-level outlook.

Segment by Technical Route

• Centrifugal Slurry Recycling System
• Filtration-based Slurry Recycling System

Segment by Process

• Wafer Slicing/Grinding Slurry Recycling System
• CMP/Polishing Slurry Recycling System
• Silicon Wastewater/Particle Recovery System

Segment by Application

• Semiconductor
• PV

Who Can Use This Report?

This report is written for decision-makers who need a clear, data-backed view of the global Slurry Recycling System market:

• Manufacturers, suppliers and solution providers benchmarking their position and planning product, capacity and go-to-market strategy
• Distributors, channel partners and end users in Semiconductor, PV evaluating demand and sourcing options
• Investors, financial analysts and consultants assessing growth opportunities, competitive dynamics and M&A potential
• Government agencies, industry associations and research institutions tracking industry developments and policy impact