Global EUV Lithography Pellicle Market Strategic Research Report

Scope of the Report

The global EUV Lithography Pellicle market size is predicted to grow from US$ 102 million in 2025 to US$ 184 million in 2032; it is expected to grow at a CAGR of 8.9% from 2026 to 2032.

In a typical semiconductor process, a thin protective film is usually placed on the surface of the photomask to protect it from contaminants. This thin film, called a pellicle, prevents undesirable conditions or defects in the wafer circuit pattern, thereby protecting the IC chip from potential damage. In addition, the mask protective film is also a consumable that needs to be replaced regularly, and because the light source wavelength of EUV lithography equipment is shorter, the protective film needs to be thinner to increase light transmittance.

Initially, the pellicle was a single-layer structure with a core layer made of polysilicon. Since 2021, EUV pellicle have adopted composite materials. Its key components now consist of alternating molybdenum disilicide (MoSi₂) and silicon (Si) layers to form a multi-layer structure. EUV transmittance (EUVT) is a key performance indicator of EUV pellicle. The transition from a single-layer structure to a multi-layer structure has increased EUVT from about 82% to about 90%. The next generation of film technology will go beyond structural changes (from single-layer to multi-layer) and introduce material advances, leading to the emergence of CNT pellicle.

Driven by advances in artificial intelligence (AI) and computing technology, the semiconductor industry's demand for advanced chips continues to grow, with the fastest growth in chips below 7nm manufactured using EUV technology. In advanced processes of 7nm and below, the pattern size on the mask may be only tens of nanometers, which places extremely strict requirements on the uniformity and defect control of the Pellicle. The next generation of high-power EUV lithography machines operates at more than 500W, and EUV films are needed to protect the photomask from particle contamination during chip production.

In recent years, the phenomenon of chipmakers adopting extreme ultraviolet (EUV) processes in their advanced chip manufacturing is rapidly increasing. To meet this growing demand, many companies are developing protective films for EUV processes.

ASML launched its first EUV pellicle in 2019 and licensed the technology to Mitsui Chemicals, which began mass sales in 2021. Since then, ASML has made improvements to its pellicle. It is reported that Mitsui Chemicals' next-generation CNT pellicle production facility will be completed by the end of 2025.

In 2021, South Korean company S&S Tech developed a pellicle with a transmittance of more than 90%. FST's EUV pellicle is still in the development stage.

Canatu has been working with Imec since 2015 to develop CNT pellicle to meet performance targets such as life and transmittance, thermal durability, permeability and strength.

Key Questions Addressed in this Report

What is the 10-year outlook for the global EUV Lithography Pellicle market?

What factors are driving EUV Lithography Pellicle market growth, globally and by region?

Which technologies are poised for the fastest growth by market and region?

How do EUV Lithography Pellicle market opportunities vary by end market size?

How does EUV Lithography Pellicle break out by Type, by Application?

This report presents a comprehensive overview of the global EUV Lithography Pellicle market, covering market size and forecast, segmentation by product type and application, competitive landscape, leading players and regional and country-level outlook.

Segment by Type

• Transmittance: ＞90%
• Transmittance: ≤ 90%

Segment by Application

• Integrated Device Manufacturer (IDM)
• Foundry

Who Can Use This Report?

This report is written for decision-makers who need a clear, data-backed view of the global EUV Lithography Pellicle market:

• Manufacturers, suppliers and solution providers benchmarking their position and planning product, capacity and go-to-market strategy
• Distributors, channel partners and end users in Integrated Device Manufacturer (IDM), Foundry evaluating demand and sourcing options
• Investors, financial analysts and consultants assessing growth opportunities, competitive dynamics and M&A potential
• Government agencies, industry associations and research institutions tracking industry developments and policy impact